Design and servo control of a single-deck planar maglev stage

Lai, Y.-C.Y.-C.LaiLee, Y.-L.Y.-L.LeeYen, J.-Y.J.-Y.YenY.-L.YenJIA-YUSH YEN2020-01-132020-01-132007https://scholars.lib.ntu.edu.tw/handle/123456789/447612Design and servo control of a single-deck planar maglev stageconference paper10.1109/TMAG.2007.8935302-s2.0-34249112815https://www.scopus.com/inward/record.uri?eid=2-s2.0-34249112815&doi=10.1109%2fTMAG.2007.893530&partnerID=40&md5=a83d9ef7ae5eceb5021a40ebde721c3d