High mobility a-Si:H TFT fabricated by hot wire chemical vapor deposition

Hsueh, C.-Y.C.-Y.HsuehYang, C.-H.C.-H.YangSI-CHEN LEE2018-09-102018-09-102010http://www.scopus.com/inward/record.url?eid=2-s2.0-78650361793&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/358275High mobility a-Si:H TFT fabricated by hot wire chemical vapor depositionconference paper