Very low voltage SiO2/HfON/HfAlO/TaN memory with fast speed and good retention

Lai, CHCHLaiChin, AlbertAlbertChinKao, HLHLKaoChen, KMKMChenMINGHWEI HONGKwo, JJKwoChi, CCCCChi2018-09-102018-09-102006http://scholars.lib.ntu.edu.tw/handle/123456789/323257Very low voltage SiO2/HfON/HfAlO/TaN memory with fast speed and good retentionjournal article