Characteristics of Zr-Doped ZnO Thin Films Grown by Atomic Layer Deposition

Lin, Ming-ChihMing-ChihLinChang, Yao-JenYao-JenChangChen, Miin-JangMiin-JangChenChu, Cheng-JyeCheng-JyeChu2012-10-242018-06-282012-10-242018-06-282011http://ntur.lib.ntu.edu.tw//handle/246246/243790en-USCharacteristics of Zr-Doped ZnO Thin Films Grown by Atomic Layer Depositionjournal article10.1149/1.3575161