Fan, K.C.K.C.FanFan, K. C.K. C.FanFei, Y. T.Y. T.FeiFei, Y.T.Y.T.FeiYu, X. F.X. F.YuYu, X.F.X.F.YuChen, Y.J.Y.J.ChenChen, Y. J.Y. J.ChenWang, W.L.W.L.WangWang, W. L.W. L.WangChen, F.F.ChenLiu, Y.S.Y.S.Liu2010-10-192018-06-282010-10-192018-06-282006-01http://ntur.lib.ntu.edu.tw//handle/246246/217079en-USDevelopment of a low cost Micro-CMM for 3D Micro/nano Measurementsjournal article