An alternative efficient method (DBEM) for simulating the electrostatic field and levitating force of a MEM combdrive

Y.S. LiaoS.W. ChyuanJ.T. ChenYUNN-SHIUAN LIAO2021-12-062021-12-062004https://scholars.lib.ntu.edu.tw/handle/123456789/589597An alternative efficient method (DBEM) for simulating the electrostatic field and levitating force of a MEM combdrivejournal article