H.H.LinJ.G.HwuJENN-GWO HWU2019-10-312019-10-312016https://scholars.lib.ntu.edu.tw/handle/123456789/429067Surface Non-Uniformity Induced Frequency Dispersion in Accumulation Capacitance for Silicon MOS(n) Capacitorjournal article10.1109/ted.2016.2565692