范光照Chu, C.L.C.L.ChuS.H. ChangChung, T.T.T.T.ChungFan, K. C.K. C.Fan2009-05-152018-06-282009-05-152018-06-282001-05http://ntur.lib.ntu.edu.tw//handle/246246/156514en-USDevelopment of a Micro-CMM for Nanometrologyconference paper