SiO 2 thickness dependence of C-V dispersion in stacked Al/HfO 2/SiO 2/4H-SiC capacitor

JENN-GWO HWU2018-09-102018-09-102012http://www.scopus.com/inward/record.url?eid=2-s2.0-84869053040&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/370333SiO 2 thickness dependence of C-V dispersion in stacked Al/HfO 2/SiO 2/4H-SiC capacitorconference paper10.1149/1.3700886