Application of nanosphere lithography to the fabrication of nanorod LEDs and to the performance enhancement of conventional LEDs

Yun-Wei ChengTzu-Chun LuMin-Yung KeKun-Mao PanLiang-Yi ChenHung-Li ChiangYing-Yuan HuangJianJang HuangJIAN-JANG HUANG2018-09-102018-09-102009-11http://scholars.lib.ntu.edu.tw/handle/123456789/350193The process of nanosphere lithography was developed and applied to LED epistructure. We demonstrated p-i-n nanorod LED arrays with some specific characteristics. Moreover, LEDs encompassed with self-aligned nanorods are fabricated. Light diffraction behaviors are characterized. The results are explained by photonic crystal effect. © 2009 SPIE-OSA-IEEE.Gan; Light emitting diode; Light extraction efficiency; Nanorod; Nanosphere lithography[SDGs]SDG7GaN light-emitting diodes; LED arrays; Light diffraction; Light-extraction efficiency; Nano Sphere Lithography; Performance enhancements; Self-aligned; Extraction; Gallium alloys; Light; Light emission; Lighting; Lithography; Nanorods; Nanospheres; Photonic crystals; Photovoltaic effects; Physical optics; Light emitting diodesApplication of nanosphere lithography to the fabrication of nanorod LEDs and to the performance enhancement of conventional LEDsconference paper10.1117/12.851888