Surface-micromachined 2D optical scanners with optically flat single-crystalline silicon micromirrors

Su, G.-D.J.G.-D.J.SuPatterson, P.R.P.R.PattersonWu, M.C.M.C.WuGUO-DUNG JOHN SU2018-09-102018-09-102001http://www.scopus.com/inward/record.url?eid=2-s2.0-0034865818&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/293463Surface-micromachined 2D optical scanners with optically flat single-crystalline silicon micromirrorsconference paper10.1117/12.426942