Thick and Thermally Isolated Si Microheaters for Microfabricated Preconcentrators

WEI-CHENG TIANS. W. Pang2018-09-102018-09-102003-01http://scholars.lib.ntu.edu.tw/handle/123456789/304309Thick and Thermally Isolated Si Microheaters for Microfabricated Preconcentratorsjournal article10.1116/1.15390652-s2.0-0037207719WOS:000182603900049