Chang, C.-Y.C.-Y.ChangSEN-YEU YANGWu, M.-S.M.-S.WuJiang, L.-T.L.-T.JiangLON A. WANG2020-01-132020-01-13200700214922https://scholars.lib.ntu.edu.tw/handle/123456789/448191Microlens projection lithography is a new lithography method that uses a microlens array with aperture stops to image a single pattern on a mask onto a resist layer, forming an array of the miniaturized pattern. However, the fabrication of a microlens array with aperture stops is complicated, time-consuming and requires expensive facilities. In this paper, we report a single-step fabrication method of plastic microlens arrays with aperture stops. By using gas pressure to hot press a stainless-steel shadow mask with a microhole array onto a thermoplastic film, the softened polymer material is partially filled into the holes of the shadow mask, and forms a convex surface due to surface tension. After cooling, while keeping the microlens array and shadow mask attached, a plastic microlens array with aperture stops is obtained. To verify its capacity, a microlens projection lithography facility has been designed, constructed, and tested. Arrays of μm-sized patterns have been successfully fabricated using transparency masks of a mm-sized pattern. ©2007 The Japan Society of Applied Physics.Aperture stop; Hot press; Microlens array; Microlens projection lithography; Shadow maskImage acquisition; Photolithography; Plastics; Polymers; Stainless steel; Surface tension; Thermoplastics; Aperture stops; Microlens projection lithography; Plastic microlens array; Shadow mask; Microlensesjournal article10.1143/JJAP.46.29322-s2.0-34547864675