Design, test and qualification of stiction-free MEMS optical switches

Su, G.-D.J.G.-D.J.SuJiang, F.F.JiangChiu, E.E.ChiuAvakian, A.A.AvakianDickson, J.J.DicksonJia, D.D.JiaTsao, T.T.TsaoGUO-DUNG JOHN SU2018-09-102018-09-102003http://www.scopus.com/inward/record.url?eid=2-s2.0-18944371574&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/303140Design, test and qualification of stiction-free MEMS optical switchesconference paper10.1109/CLEOPR.2003.1274564