Precision fabrication of an arrayed micro metal probe by the laser-LIGA process

Liao, Y.-S.Y.-S.LiaoYUNN-SHIUAN LIAO2020-01-132020-01-132005https://scholars.lib.ntu.edu.tw/handle/123456789/448666Precision fabrication of an arrayed micro metal probe by the laser-LIGA processjournal article10.1088/0960-1317/15/12/0272-s2.0-27944440011https://www.scopus.com/inward/record.uri?eid=2-s2.0-27944440011&doi=10.1088%2f0960-1317%2f15%2f12%2f027&partnerID=40&md5=c4916b02ad09ca92a945c1f62d61fe3b