A glass cantilever beam sensor combined with a spherical reflecting mirror for sensitivity enhancement

Liao, C.-D.C.-D.LiaoTsai, J.-C.J.-C.TsaiJUI-CHE TSAI2018-09-102018-09-102008http://www.scopus.com/inward/record.url?eid=2-s2.0-54049140470&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/340822A glass cantilever beam sensor combined with a spherical reflecting mirror for sensitivity enhancementconference paper10.1109/OMEMS.2008.4607870