Atom-to-atom interactions for atomic layer deposition of trimethylaluminum on Ga-rich GaAs (001)-4 ? 6 and As-rich GaAs(001)-2 ? 4 surfaces: A synchrotron radiation photoemission study

Pi, T.-W.T.-W.PiLin, H.-Y.H.-Y.LinLiu, Y.-T.Y.-T.LiuLin, T.-D.T.-D.LinWertheim, G.K.G.K.WertheimKwo, J.J.KwoMINGHWEI HONG2019-12-272019-12-27201310.1186/1556-276X-8-169https://scholars.lib.ntu.edu.tw/handle/123456789/443336Atom-to-atom interactions for atomic layer deposition of trimethylaluminum on Ga-rich GaAs (001)-4 ? 6 and As-rich GaAs(001)-2 ? 4 surfaces: A synchrotron radiation photoemission studyjournal article2-s2.0-84878763194https://www.scopus.com/inward/record.uri?eid=2-s2.0-84878763194&doi=10.1186%2f1556-276X-8-169&partnerID=40&md5=eba4b657c469deac52de9ba43fe3adba