Lithography-patterning-fidelity-aware electron-optical system design optimization

Sheng-Yung ChenHoi-Tou NgShiau-Yi MaHsing-Hong ChenKuen-Yu TsaiKUEN-YU TSAI2018-09-102018-09-102011-05http://scholars.lib.ntu.edu.tw/handle/123456789/366472Lithography-patterning-fidelity-aware electron-optical system design optimizationconference paper2-s2.0-84255172419WOS:000295469600011