Lossless compression algorithm based on dictionary coding for multiple e-beam direct write system

Lin, P.-C.P.-C.LinPai, Y.-H.Y.-H.PaiChiu, Y.-H.Y.-H.ChiuFang, S.-Y.S.-Y.FangCHUNG-PING CHEN2020-06-112020-06-112016https://scholars.lib.ntu.edu.tw/handle/123456789/500998Lossless compression algorithm based on dictionary coding for multiple e-beam direct write systemconference paper2-s2.0-84973645199https://www.scopus.com/inward/record.uri?eid=2-s2.0-84973645199&partnerID=40&md5=6aae1c1d0b4b2ae0f186dc389b4a1096