Design and Processing of Integrated Micro Accelerometer Using Standard CMOS Process

Dai, Ching-LiangChing-LiangDaiChang, Pei-ZenPei-ZenChangLu, Shui-ShomgShui-ShomgLu2010-10-202018-06-292010-10-202018-06-291997-01http://ntur.lib.ntu.edu.tw//handle/246246/217985en-USDesign and Processing of Integrated Micro Accelerometer Using Standard CMOS Process