2008-08-012024-05-17https://scholars.lib.ntu.edu.tw/handle/123456789/689468摘要：光學微機電技術已廣泛地被採用於眾多科技領域，其中包括了調適光學、光纖通訊(Optical Fiber Communication)、醫療、顯示技術、及波長可調變元件等方面的應用。另外，光學微機電技術也可應用於自由空間光通訊(Free-Space Optical Communication)。 自由空間光通訊是一種有別於光纖通訊的訊息傳輸方式，在現今已受到相當大的矚目，其應用包含：無線遠距遙測查詢(Wireless Long-Distance Remote Interrogation)、衛星間之通訊、無人飛行載具(Unmanned Aerial Vehicle, UAV)間之通訊等。另外，倘若與微波通訊(Radio-Frequency Communication)相比較，在自由空間光通訊中，傳輸訊號的光束具有極佳之方向性，因此在訊息交換時，通訊雙方發送及接收的動作，將可「專注」於特定方向。舉例來說，發送端可將雷射光，直接瞄準照射於接收端。使用此具備「方向性」之通訊方式，傳輸之訊號較不易被人攔截，可有較佳之安全性。 用於自由空間光通訊的光學微機電元件大致可分為兩類：﹝一﹞可調變回射式元件，如：Corner Cube Retro-reflector (CCR)；﹝二﹞掃描式光學元件，如：二軸旋轉微鏡片。本計畫將從以上這兩個方向進行元件之研發。針對第一個部分，預期目標是達到大接收角度(>±45°)及低驅動電壓(<20 V)之回射式元件。至於第二個部分，將研發具備大角度光學偏折能力(>±10°)之掃描式光學元件。元件製作並測試完成後，我們將架構自由空間光通訊系統之原型，以驗證其做為人造衛星或無人飛行載具間通訊橋樑之能力。<br> Abstract: Optical MEMS (Micro-Electro-Mechanical Systems) has been widely used in many research areas. Its application includes adaptive optics, optical fiber communication, medicine, display technologies, and wavelength-tunable devices (e.g. lasers, filters, and detectors), etc. It can also be incorporated into free-space optical communication. Free-space optical communication is a different field from optical fiber communication. It has attracted considerable attention for a variety of applications, such as wireless long-distance remote interrogation, inter-satellite communication, and communication between unmanned aerial vehicles (UAVs). Free-space optical communication can be made less susceptible to unwanted detection than radio-frequency communication because it is possible to concentrate an optical transmission in a narrow beam aimed toward the intended recipient. Hence free-space optical transmission is an attractive option for covert communication. The optical MEMS components used for free-space optical communication can be divided into two categories: (1) Retro-reflective-type devices with modulation ability, such as corner cube retro-reflectors (CCRs); (2) Beam-steering devices, such as two-axis micromirrors. In this project, we will develop MEMS components for each category. For the first part, the goal is to obtain retro-reflective-type devices with large acceptance angles (>±45°) and low actuation voltages (<20 V). For the second part, beam-steering devices capable of achieving large optical deflection (>±10°) are targeted. Once the devices are fabricated and tested, a prototype free-space optical communication system is to be constructed. Data transfer using this MEMS-based free-space optical communication system will be demonstrated.自由空間光通訊光學微機電微機電元件無線遠距遙測查詢無人飛行載具人造衛星Free-Space Optical CommunicationOptical MEMSMicro-Electro-Mechanical SystemsWireless Long-Distance Remote InterrogationUnmanned Aerial Vehicle (UAV)Satellite