Ye, PDPDYeWilk, GDGDWilkKwo, JJKwoYang, BAYBBAYBYangGossmann, H-JLH-JLGossmannFrei, MAFMMAFMFreiChu, SNGSNGChuMannaerts, JPJPMannaertsSergent, MASMMASMSergentMINGHWEI HONGothers2018-09-102018-09-102003http://scholars.lib.ntu.edu.tw/handle/123456789/302783GaAs MOSFET with oxide gate dielectric grown by atomic layer depositionjournal article10.1109/LED.2003.8121442-s2.0-0037766787