Lee, C.-Y.C.-Y.LeeCheng, Y.-C.Y.-C.ChengWu, T.-T.T.-T.WuChen, Y.-Y.Y.-Y.ChenChen, W.-J.W.-J.ChenPao, S.-Y.S.-Y.PaoChang, P.-Z.P.-Z.ChangChen, P.-H.P.-H.ChenYen, K.-H.K.-H.YenXiao, F.-Y.F.-Y.XiaoPING-HEI CHEN2018-09-102018-09-102004http://www.scopus.com/inward/record.url?eid=2-s2.0-2942729810&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/307895A novel method for evaluating the thickness of silicon membrane using a micromachined acoustic wave sensorjournal article