Dept. of Electr. Eng., National Taiwan Univ.Chen, Mei-YungMei-YungChenWang, Ming-JyhMing-JyhWangFu, Li-ChenLi-ChenFu2007-04-192018-07-062007-04-192018-07-061999-12http://ntur.lib.ntu.edu.tw//handle/246246/2007041910021682application/pdf551409 bytesapplication/pdfen-USDual-axis Maglev guiding system modeling and controller design for wafer transportationjournal article10.1109/CDC.1999.831324http://ntur.lib.ntu.edu.tw/bitstream/246246/2007041910021682/1/00831324.pdf