Sacrificial structure for effective sapphire substrate liftoff based on photoelectrochemical etching

Hsieh, C.C.HsiehSu, C.-Y.C.-Y.SuWeng, C.-M.C.-M.WengChi, T.-T.T.-T.ChiKiang, Y.-W.Y.-W.KiangCHIH-CHUNG YANGYEAN-WOEI KIANG2020-06-112020-06-112015https://scholars.lib.ntu.edu.tw/handle/123456789/497827Sacrificial structure for effective sapphire substrate liftoff based on photoelectrochemical etchingjournal article10.1109/LPT.2015.23921082-s2.0-84924917993https://www.scopus.com/inward/record.uri?eid=2-s2.0-84924917993&doi=10.1109%2fLPT.2015.2392108&partnerID=40&md5=982795175ec41b2158fcd926d3e612e3