Non-delta-chrome optical proximity correction methodology for process models with three-dimensional mask effects

Philip C. W. NgKuen-Yu TsaiLawrence S. Melvin IIIKUEN-YU TSAI2018-09-102018-09-102011-09http://scholars.lib.ntu.edu.tw/handle/123456789/366470Non-delta-chrome optical proximity correction methodology for process models with three-dimensional mask effectsjournal article10.1117/1.36160432-s2.0-80055035724WOS:000295469600011