Yu-Tian ShenLiu, C.-H.C.-H.LiuChen, C.-Y.C.-Y.ChenNg, H.-T.H.-T.NgTsai, K.-Y.K.-Y.TsaiWang, F.-M.F.-M.WangKuan, C.-H.C.-H.KuanLee, Y.-M.Y.-M.LeeCheng, H.-H.H.-H.ChengLi, J.-H.J.-H.LiKUEN-YU TSAICHIEH-HSIUNG KUANJIA-HAN LI2018-09-102018-09-102012-02http://scholars.lib.ntu.edu.tw/handle/123456789/374083[SDGs]SDG7Electron-beam proximity effect model calibration for fabricating scatterometry calibration samplesconference paper10.1117/12.9181092-s2.0-84861057304