Lin, H. Y.H. Y.LinFan, C. C.C. C.FanTsai, D. P.D. P.TsaiChien, F. S.-S.F. S.-S.ChienGwo, S.S.Gwo2011-02-172018-06-282011-02-172018-06-282001-01http://ntur.lib.ntu.edu.tw//handle/246246/231728en-USNanolithography on silicon surface using a tuning fork STM/AFM