Parameter optimization of etching process for a LGP stamper.

WEN-CHIN CHENTai, Yi-ChiaYi-ChiaTaiWang, Min-WenMin-WenWangTsai, Hsiang-ChengHsiang-ChengTsai2020-05-042020-05-042013https://scholars.lib.ntu.edu.tw/handle/123456789/490316Parameter optimization of etching process for a LGP stamper.journal article10.1007/s00521-012-1103-2https://doi.org/10.1007/s00521-012-1103-2