Efficient and accurate optical scatterometry diagnosis of grating variation based on segmented moment matching and singular value decomposition method

Liu, J.-H.J.-H.LiuLiu, C.-W.C.-W.LiuHuang, K.-J.K.-J.HuangLi, T.-Y.T.-Y.LiChiu, M.-C.M.-C.ChiuHong, J.-J.J.-J.HongChen, C.C.-P.C.C.-P.ChenJao, C.-S.C.-S.JaoLON A. WANGCHUNG-PING CHEN2020-06-042020-06-042009https://scholars.lib.ntu.edu.tw/handle/123456789/497252Efficient and accurate optical scatterometry diagnosis of grating variation based on segmented moment matching and singular value decomposition methodjournal article10.1016/j.mee.2009.01.0312-s2.0-67349185137https://www.scopus.com/inward/record.uri?eid=2-s2.0-67349185137&doi=10.1016%2fj.mee.2009.01.031&partnerID=40&md5=625976378d3afc974a0fb7b6683fd661