Dynamic out-of-plane profilometry for nano-scale full field characterization of MEMS with automatic detection of vibratory modes and MHz-scale measurement bandwidth

Chen, L.-C.L.-C.ChenLai, H.-W.H.-W.LaiChang, C.C.C.C.ChangHuang, Y.-T.Y.-T.HuangChen, J.-L.J.-L.ChenLIANG-CHIA CHEN2020-01-132020-01-132006https://scholars.lib.ntu.edu.tw/handle/123456789/447887Dynamic out-of-plane profilometry for nano-scale full field characterization of MEMS with automatic detection of vibratory modes and MHz-scale measurement bandwidthconference paper10.1117/12.6859762-s2.0-33846197009https://www.scopus.com/inward/record.uri?eid=2-s2.0-33846197009&doi=10.1117%2f12.685976&partnerID=40&md5=9e006eea1f81e730448c438987926ad1