Generalized formula for curvature radius and layer stresses caused by thermal strain in semiconductor multilayer structures

Feng, Z.C.Z.C.FengLiu, H.D.H.D.Liu2010-09-022018-07-052010-09-022018-07-051983-01http://ntur.lib.ntu.edu.tw//handle/246246/193696en-USGeneralized formula for curvature radius and layer stresses caused by thermal strain in semiconductor multilayer structuresjournal article