Hsieh C.H.Huang Y.S.Tiong K.K.Fan C.W.Chen Y.F.Chen L.C.Wu J.J.LI-CHYONG CHENYANG-FANG CHEN2022-08-092022-08-09200000218979https://www.scopus.com/inward/record.uri?eid=2-s2.0-0000918038&doi=10.1063%2f1.371856&partnerID=40&md5=14714e66428cb1141895bbcf21777609https://scholars.lib.ntu.edu.tw/handle/123456789/616429A detailed piezoreflectance (PzR) study of an Fe-containing silicon carbon nitride crystalline film in the temperature range between 15 and 580 K was performed. From the line shape fit of the PzR spectra, the impurity to band and the direct band-to-band transition energies which are denoted as Ei and Edg, respectively, at various temperatures were accurately determined. The parameters that describe the temperature dependence of Ei and Edg are evaluated and discussed. © 2000 American Institute of Physics.Piezoreflectance study of an Fe-containing silicon carbon nitride crystalline filmjournal article10.1063/1.3718562-s2.0-0000918038