Design and control of a long-stroke nano-positioning stage

Wu R.C.Tsai I.H.Wang F.C.Yen J.Y.2019-07-032019-07-0320139.78148E+12https://www.scopus.com/inward/record.uri?eid=2-s2.0-84902506113&partnerID=40&md5=c2ad5e884023982bce88729756890107https://scholars.lib.ntu.edu.tw/handle/123456789/412600Design and control of a long-stroke nano-positioning stageconference paper2-s2.0-84902506113