Improved Performance of n-MOSFET's with Reoxidized Nitrided Oxide (RNO) by Using N20 as the Reoxidizer

胡振國Wu, Z. Y.Z. Y.WuWu, Y. L.Y. L.WuHwu, Jenn-GwoJenn-GwoHwu2009-04-272018-07-062009-04-272018-07-061993http://ntur.lib.ntu.edu.tw//handle/246246/154356en-USImproved Performance of n-MOSFET's with Reoxidized Nitrided Oxide (RNO) by Using N20 as the Reoxidizerconference paper