Tunneling piezoresistive tactile sensing array fabricated by a novel fabrication process with membrane filters

Ma, C.-W.C.-W.MaLin, T.-H.T.-H.LinYang, Y.-J.Y.-J.YangYAO-JOE YANG2020-01-132020-01-132015https://scholars.lib.ntu.edu.tw/handle/123456789/448470Tunneling piezoresistive tactile sensing array fabricated by a novel fabrication process with membrane filtersconference paper10.1109/MEMSYS.2015.70509352-s2.0-84931058715https://www.scopus.com/inward/record.uri?eid=2-s2.0-84931058715&doi=10.1109%2fMEMSYS.2015.7050935&partnerID=40&md5=32db991e8cdc1ce1726a46858fcd6109