Dynamic performance of micro coordinate measurement probe

PO-JEN SHIHWEN-PIN SHIHLin, Tzung-HanTzung-HanLinHuang, Han-PangHan-PangHuang2018-09-102018-09-102006http://www.scopus.com/inward/record.url?eid=2-s2.0-46149090829&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/3225125181701 bytesapplication/pdfDynamic performance of micro coordinate measurement probeconference paper10.1109/NEMS.2006.334609