臺灣大學: 機械工程學研究所王富正謝錦輝Hsieh, Chin-HuiChin-HuiHsieh2013-04-012018-06-282013-04-012018-06-282010http://ntur.lib.ntu.edu.tw//handle/246246/256226本論文針對雙軸壓電定位平台進行強韌控制器之設計。由於半導體科技發展進入奈米製程，在高精度的要求下，載台的定位能力相當重要，但是傳統機械傳動架構不能滿足高精度之要求，所以使用壓電材料做為驅動裝置。由於壓電材料具有高解析、高精度以及出力大等特性，用來驅動定位平台，可達到精密定位控制；但是壓電材料具有遲滯效應、潛變等非線性之動態特性，會影響系統性能，所以必須採閉迴路控制來提升系統定位能力。 針對本論文採用之雙軸壓電定位平台，吾人由系統識別得到轉移函數，並且透過強韌控制理論，把非線性因素視為系統不確定性，進行強韌控制器設計，最後則將所設計的強韌控制器進行實驗安裝，在確保系統的穩定性的前提下能夠使定位平台達到高精度之定位控制。實驗結果顯示所設計的強韌控制器確實可以達到預設之目標。This thesis applies robust control to a two-axis piezoelectric nanopositioning stage. As semiconductor technology develops, the precision requirement for positioning platforms is increasingly stringent. Because the traditional mechanical transmission structure can no longer meet the requirements of high precision, we use piezoelectric actuators to drive the mechanism. The piezoelectric material can achieve precise position control because of it`s high resolution, high accuracy and large driving force. But the piezoelectric material has non-linear dynamic characteristics, such as hysteresis, that might degrade the system performance. Therefore, closed-loop controls are used to improve system stability and performance. At first, we identify the stage and define the nominal plant, where the nonlinear factors are regarded as system uncertainties. Using the nominal plant, we then design robust controllers. Finally, the designed controllers are implemented to the system for experimental verification. The results demonstrate the effectiveness of the robust controllers.2030495 bytesapplication/pdfen-US半導體定位平台壓電材料遲滯效應強韌控制迴路成型法系統識別semiconductornanopositioning stagepiezoelectric materialhysteresisrobust controlidentification.thesishttp://ntur.lib.ntu.edu.tw/bitstream/246246/256226/1/ntu-99-R97522834-1.pdf