Structure and Elastic Properties of Amorphous SiCN Films

G. LehmannP. HessJ.-J. WuC. T. WuT. S. WongK. H. ChenL. C. ChenH.-Y. LeeM. AmkreutzTh. Frauenheim2020-06-202020-06-20200124699950https://scholars.lib.ntu.edu.tw/handle/123456789/503910Structure and Elastic Properties of Amorphous SiCN Filmsjournal article10.1103/PhysRevB.64.165305