Quality factor improvement of on-chip inductors for HIPERLAN RFIC by micromachining

Chiu, Hong-WeiHong-WeiChiuChen, Hsiao-ChinHsiao-ChinChenLu, Shey-shiShey-shiLu2007-04-192018-07-062007-04-192018-07-062001http://www.scopus.com/inward/record.url?eid=2-s2.0-0035728882&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/293599http://ntur.lib.ntu.edu.tw/bitstream/246246/2007041910021384/1/00985505.pdfQuality factor improvement of on-chip inductors for HIPERLAN RFIC by micromachiningconference paper10.1109/APMC.2001.985505http://ntur.lib.ntu.edu.tw/bitstream/246246/2007041910021384/1/00985505.pdf