Chang, S. HS. HChangTseng, C. K.C. K.TsengChien, H. C.H. C.Chien2008-10-282018-06-282008-10-282018-06-281999-07http://ntur.lib.ntu.edu.tw//handle/246246/85680en-USAn ultra-precision XYqZ piezo-micropositioner-Part I: design and analysisjournal article