Design and fabrication of a tunable superconductive resonator utilizing micromachined tunable capacitor

Chen, Yi-JieYi-JieChenWEN-PIN SHIHShih, Wen-PinWen-PinShihKao, Cheng-KaiCheng-KaiKaoChang, Pei-ZenPei-ZenChang2018-09-102018-09-102010http://www.scopus.com/inward/record.url?eid=2-s2.0-76349105042&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/356909[SDGs]SDG7Design and fabrication of a tunable superconductive resonator utilizing micromachined tunable capacitorjournal article10.1109/JMEMS.2009.20373392-s2.0-76349105042WOS:000274213700013