Low-actuation voltage MEMS digital-to-analog converter with parylene spring structures

Ma, C.-W.C.-W.MaLee, F.-W.F.-W.LeeLiao, H.-H.H.-H.LiaoKuo, W.-C.W.-C.KuoYang, Y.-J.Y.-J.YangYAO-JOE YANG2020-01-132020-01-132015https://scholars.lib.ntu.edu.tw/handle/123456789/448467Low-actuation voltage MEMS digital-to-analog converter with parylene spring structuresjournal article10.3390/s1509215672-s2.0-84940689203https://www.scopus.com/inward/record.uri?eid=2-s2.0-84940689203&doi=10.3390%2fs150921567&partnerID=40&md5=6ad81fb8146c04074fe7ac3cb502425c