Application of Reutilization Technology to Calcium Fluoride Sludge from Semiconductor Manufacturers

Liu, Wei-TingWei-TingLiuLi, Kung-ChehKung-ChehLi2012-10-162018-06-282012-10-162018-06-282011http://ntur.lib.ntu.edu.tw//handle/246246/242711en-US[SDGs]SDG6Application of Reutilization Technology to Calcium Fluoride Sludge from Semiconductor Manufacturersjournal article10.3155/1047-3289.61.1.85http://ntur.lib.ntu.edu.tw/bitstream/246246/242711/-1/74.pdf