GaAs surface passivation using in-situ oxide deposition

Passlack, MMPasslackMINGHWEI HONGOpila, RLRLOpilaMannaerts, JPJPMannaertsKwo, JRJRKwo2018-09-102018-09-101996http://scholars.lib.ntu.edu.tw/handle/123456789/323225GaAs surface passivation using in-situ oxide depositionjournal article10.1016/S0169-4332(96)00184-52-s2.0-0030234121