2018-08-012024-05-18https://scholars.lib.ntu.edu.tw/handle/123456789/697430摘要：利用現有成熟的半導體製程技術在矽晶圓上開發矽波導光信號處理元件，實現高速矽基光互聯積體化晶片已成為次世代光互聯網路技術發展中不可或缺的重要技術，而能相容於既有的光互聯傳輸標準所需之矽光子標準元件庫也成為新的需求。本計畫目的是設計並製作出光互聯網路中所需的各式主被動矽光子元件使其具有優異的效能表現，以利未來開發矽光子元件時，能做為各頻段之光互聯傳輸標準所需之光電整合式晶片的標準元件庫，四年期間內計畫中將開發的矽光子主被動元件庫包括聚焦式光柵耦合器、針對楔形/透鏡化/小纖芯單模光纖之寬頻端面耦合器、針對 DFB Laser 之端面耦合器、慢光式高速 (> 60GHz) 鍺光偵測器、高速 (> 50 GHz) 光調制器、陣列波導式分波多工器、微環形/三角形/矩形共振器之分波多工器與濾波器、寬頻定向耦合器、寬頻低損耗光分岐器、低損耗/低串擾光波導交錯結構、光開關、光塞取器、極化分離器、極化旋轉器、表面電漿子波導分波多工器。元件設計完成後將採用專業矽光子元件代工廠製作晶片，並以多軸矽波導/光纖耦光量測平台進行元件特性驗證。此外，本計畫會同時開發兩個工具，一個是慢光結構分析建模分析工具，另一個是透鏡化光纖、楔形光纖模態線上計算工具。同時配合總計畫(第一年&第二年) 開發 2x(8x50G) = 800G Tx/Rx 子系統測試版整合式矽光子平台晶片，與Single Channel 100 Gb/s PAM4 Tx/Rx 子系統測試版及優化板之整合式矽光子平台晶片(第三年&第四年)。<br> Abstract: Owing to the existing mature semiconductor manufacturing technology, the optical signal processing devices based on silicon waveguides for implementing the high-speed silicon-based optical interconnect chips have become the indispensable and essential technology for the next-generation optical interconnect networks. The standard device library which is compatible to the existing optical interconnect technologies and standards becomes an emerging requirement. In this project, the main target is to design and fabricate various active and passive silicon photonic devices which have excellent performances to serve as the standard device library for the transmission standards at various wavelength bands for the optical interconnect networks, such as Curved Grating Coupler, Edge Broadband Edge Coupler for Wedged/Lensed/Small MFD Fibers, Edge Coupler for DFB Laser, Slow Light High-Speed Ge Photodetectors, High-Speed Modulator, Micro-ring Resonator WDM & Filter, Arrayed Waveguide Mux/DeMux, Micro-ring/Micro-triangle/Micro-rectangle Resonator Filter, Broadband Directional Coupler, Broadband Low-Loss Splitter, Low-Loss/Low-Crosstalk Crossing, Optical Switch, Optical Add-Drop Multiplexer, Copper on Silicon Surface Plasmon Waveguide WDM, will be developed in the consecutive four years. After being designed with simulation tools, the devices will be fabricated by the professional foundry for silicon photonics and the chips will be measured and characterized with multi-axis fiber-coupled silicon-waveguide measurement platform. In addition, two tools, the Slow Light (Photonic Crystal) Structure Fast Estimation Formulation Tool and Lensed/Wedged Fiber Mode Calculation Online Tool will be developed. Meanwhile, the test design and optimized version of the silicon photonic chips for the major project to achieve the 2x (8x50G) = 800G Tx/Rx sub-system will be developed in the first year and second year, respectively. In addition, the test design and optimized version of the silicon photonic chips for the single-channel 100 Gb/s PAM4 Tx/Rx sub-system will also be developed in the third year and the fourth year, respectively.矽光子分波多工光調制器光偵測器Silicon PhotonicsWDMOptical ModulatorPhotodetector