Nitric acid compensated aluminum oxide dielectrics with improved negative bias reliability and positive bias temperature response

Lin, C.-C.C.-C.LinHwu, J.-G.J.-G.HwuJENN-GWO HWU2018-09-102018-09-102013http://www.scopus.com/inward/record.url?eid=2-s2.0-84873656915&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/378071Nitric acid compensated aluminum oxide dielectrics with improved negative bias reliability and positive bias temperature responsejournal article10.1063/1.4790371