A Microelectromechanical Digital-to-Analog Converter As The Step-Motion Reference Mirror for A White-Light Interferometry System

H.-H. LiaoY.-J. YangYAO-JOE YANG2021-11-252021-11-252010https://scholars.lib.ntu.edu.tw/handle/123456789/587867Xiamen, ChinaA Microelectromechanical Digital-to-Analog Converter As The Step-Motion Reference Mirror for A White-Light Interferometry Systemconference paper