Doping concentration and surface morphology of 4H-SiC C-face epitaxial growth

Lee, K.-Y.K.-Y.LeeLee, S.-Y.S.-Y.LeeKUNG-YEN LEE2020-01-172020-01-172010https://scholars.lib.ntu.edu.tw/handle/123456789/451528Doping concentration and surface morphology of 4H-SiC C-face epitaxial growthconference paper10.4028/www.scientific.net/MSF.645-648.1232-s2.0-77955460033https://www.scopus.com/inward/record.uri?eid=2-s2.0-77955460033&doi=10.4028%2fwww.scientific.net%2fMSF.645-648.123&partnerID=40&md5=8d44f00f6199db5d5a0a96a78d983a80