Conceptual Design of Planar Retainer Mechanisms for Bottom Opening Wafer Transport Container in SMIF Environment

Pai, Wei-MingWei-MingPaiDAR-ZEN CHENLee, Jyh-JoneJyh-JoneLeeWu, Tzong-MingTzong-MingWu2021-11-042021-11-042003https://scholars.lib.ntu.edu.tw/handle/123456789/586282Conceptual Design of Planar Retainer Mechanisms for Bottom Opening Wafer Transport Container in SMIF Environmentconference paper